XY Piezo Stage

Description

• Travel [mm]:

• • 100?m±15%

• Table Size [mm]:

• • 120x120

• Actuator:

• • Piezo actuator

• Weight [kg]:

• • 1.2

• Theoretical Resolution (open-loop) [nm]:

• • 1

• Resolution (closed-loop) [nm]:

• • 10

• Perpendicularity (Horizontal Direction) [?m:

• • 0.1 or lower

• Positional Repeatability[µm]:

• • 0.1 or lower

• Load Capacity [N]:

• • 19.6

• Micro-displacement Sensor:

• • Digital sensor

• Compatible Cable:

• FINE-CA-3: For piezo DS1-CA-3: For digital sensor