Piezo Actuator for Objective Lens

Description

• Travel [mm]:

• • 100?m±15%

• Objective Lens Diameter [mm]:

• • Diameter Ø39 or less

• Dimensions[mm]:

• • (W)60.8 × (H)30 × (D)40

• Actuator:

• • Piezo element

• Weight [kg]:

• • 0.15

• Theoretical Resolution (open-loop) [nm]:

• • 0.8

• Resolution (closed-loop) [nm]:

• • 10

• Straightness (Xy Xz Yx Yz) [?m]:

• • 0.2 or lower

• Positional Repeatability[µm]:

• • 0.1 or lower

• Load Capacity [N]:

• • 4.9

• Micro-displacement Sensor:

• • Digital sensor

• Compatible Adapter:

• • OBL-ADP3-??

• Accessories:

• Cable (2m), four special lift spacers