Vacuum Miniature Motorized Stage - Z axes

Description

• Travel [mm]:

• • 20

• Table Size [mm]:

• • 55x60

• Feed Screw:

• • Precision ground screw Ø4mm, 0.5mm lead

• Positioning Slide:

• • Crossed roller guide

• Stage Material:

• • Aluminium

• Finish:

• • None

• Weight [kg]:

• • 0.6

• Resolution/(Full) [µm/pulse]:

• • 1

• Resolution/(Half) [µm/pulse]:

• • 0.5

• MAX Speed [mm/sec]:

• • -

• Positional Repeatability[µm]:

• • 6

• Load Capacity [N]:

• • 14.7

• Lost Motion [µm]:

• • 5

• Type:

• • Vacuum limit switch

• Limit Sensor:

• • Contact type

• Origin Sensor:

• • None

• Proximity Origin Sensor:

• • None

• Type:

• • Vacuum compatible 5-phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.)

• Motor Part Number:

• • TS3664N5 (24mm)

• Step Angle:

• • 0.72°

• Control Output:

• • Contact type

• Output Logic:

• • NORMAL OPEN

• Compatible Driver:

• • SG-5M, SG-55M, SG-514MSC, MC-7514PCL

• Compatible Controller:

• GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M*HIT-S, PGC-04