X Axes With Built In Glass-Scale Encoder

Reference number: OSE-TSDM(GS)60-15X

Travel in mm

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Description

Full closed loop control system that controls a motorized stage with built-in high resolution compact linear encoder using a special controller.

Travel [mm]: 15

Table Size [mm]: 60x60

Feed Screw: Precision ground screw Ø5mm, 0.5mm lead

Positioning Slide: Extended Contact Ball Guide

Stage Material: Steel

Weight [kg]: 0.8

Resolution/(Full) [µm/pulse]: 1

Resolution/(Half) [µm/pulse]: 0.5

MAX Speed [mm/sec]: 5

Positioning Accuracy [µm]: 5

Positional Repeatability[µm]: 0.5

Load Capacity [N]: 19.6

Pitch [´´/N*cm]: 0.4

Yaw [´´/N*cm]: 0.4

Roll [´´/N*cm]: 0.4

Lost Motion [µm]: 0.5

Backlash [µm]: 10

Perpendicularity [µm]: -

Parallelism [µm]: 50

Running Parallelism [µm]: 10

Pitch [´´]/Yaw [´´]: 15/15

Sensor Part Number: GP1S092HCPI (Sharp Corporation)

Limit Sensor: Equipped (NORMAL CLOSE)

Origin Sensor: None

Proximity Origin Sensor: None

Type: 5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)

Motor Part Number: PK513PB-C9 (20mm)

Step Angle: 0.72°

Downloads

OSE-TSDM(GS)60-15X_STP.zip

MotorizedStages.zip

Travel [mm]: 20

Table Size [mm]: 80x80

Feed Screw: Precision ground screw Ø5mm, 0.5mm lead

Positioning Slide: Extended Contact Ball Guide

Stage Material: Steel

Weight [kg]: 1.1

Resolution/(Full) [µm/pulse]: 1

Resolution/(Half) [µm/pulse]: 0.5

MAX Speed [mm/sec]: 5

Positioning Accuracy [µm]: 5

Positional Repeatability[µm]: 0.5

Load Capacity [N]: 29.4

Pitch [´´/N*cm]: 0.2

Yaw [´´/N*cm]: 0.2

Roll [´´/N*cm]: 0.2

Lost Motion [µm]: 0.5

Backlash [µm]: 10

Perpendicularity [µm]: -

Parallelism [µm]: 50

Running Parallelism [µm]: 10

Pitch [´´]/Yaw [´´]: 15/15

Sensor Part Number: PM-L24 (SUNX Co., Ltd.)

Limit Sensor: Equipped (NORMAL CLOSE)

Origin Sensor: None

Proximity Origin Sensor: None

Type: 5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)

Motor Part Number: PK513PB-C9 (20mm)

Step Angle: 0.72°

Downloads

OSE-TSDM(GS)80-20X_STP.zip

MotorizedStages.zip

Travel [mm]: 10

Table Size [mm]: 60x60

Feed Screw: Precision ground screw Ø5mm, 0.5mm lead

Positioning Slide: Extended Contact Ball Guide

Stage Material: Steel

Weight [kg]: 0.7

Resolution/(Full) [µm/pulse]: 1

Resolution/(Half) [µm/pulse]: 0.5

MAX Speed [mm/sec]: 2

Positioning Accuracy [µm]: 2

Positional Repeatability[µm]: 0.5

Load Capacity [N]: 19.6

Pitch [´´/N*cm]: 2

Yaw [´´/N*cm]: 2

Roll [´´/N*cm]: -

Lost Motion [µm]: 0.5

Backlash [µm]: 5

Perpendicularity [µm]: 8

Parallelism [µm]: 50

Running Parallelism [µm]: -

Pitch [´´]/Yaw [´´]: 15/-

Sensor Part Number: PM-F24 (SUNX Co., Ltd.)

Limit Sensor: Equipped (NORMAL CLOSE)

Origin Sensor: None

Proximity Origin Sensor: None

Type: 5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)

Motor Part Number: PK513PB-C9 (20mm)

Step Angle: 0.72°

Downloads

OSE-TSDM(GS)60-10ZF_STP.zip

MotorizedStages.zip