Piezo Stages

Reference number: OSE-SFS-H40X(CL)

Load Capacity in N

Stage Size in mm

Load Capacity in N

Stage Size in mm

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Description

Nanometer resolution high stiffness flexure stages.

Travel [mm]: 90?m±15%

Table Size [mm]: 40x40

Actuator: Piezo actuator

Weight [kg]: 0.28

Theoretical Resolution (open-loop) [nm]: 1

Resolution (closed-loop) [nm]: 10

Linearity [%]: 0.3 or lower

Perpendicularity (Horizontal Direction) [?m: 0.1 or lower

Load Capacity [N]: 9.8

Micro-displacement Sensor: Digital sensor

Compatible Cable: Attached cable (2m)

Downloads

OSE-nf.pdf

MotorizedStages.zip

Travel [mm]: 100?m±15%

Table Size [mm]: 40x40

Actuator: Piezo actuator

Weight [kg]: 0.28

Theoretical Resolution (open-loop) [nm]: 1

Resolution (closed-loop) [nm]: 10

Linearity [%]: 0.3 or lower

Perpendicularity (Horizontal Direction) [?m: 0.1 or lower

Load Capacity [N]: 6.7

Micro-displacement Sensor: Digital sensor

Compatible Cable: Attached cable (2m)

Downloads

OSE-nf.pdf

MotorizedStages.zip

Travel [mm]: 100?m±15%

Table Size [mm]: 60x60

Actuator: Piezo actuator

Weight [kg]: 0.43

Theoretical Resolution (open-loop) [nm]: 1

Resolution (closed-loop) [nm]: 10

Linearity [%]: 0.3 or lower

Perpendicularity (Horizontal Direction) [?m: 0.1 or lower

Load Capacity [N]: 14.7

Micro-displacement Sensor: Digital sensor

Compatible Cable: FINE-CA-3: For piezo DS1-CA-3: For digital sensor

Downloads

OSE-nf.pdf

MotorizedStages.zip

Travel [mm]: 100?m±15%

Table Size [mm]: 60x60

Actuator: Piezo actuator

Weight [kg]: 0.4

Theoretical Resolution (open-loop) [nm]: 1

Resolution (closed-loop) [nm]: 10

Linearity [%]: 0.3 or lower

Perpendicularity (Horizontal Direction) [?m: 0.1 or lower

Load Capacity [N]: 19.6

Micro-displacement Sensor: Digital sensor

Compatible Cable: FINE-CA-3: For piezo DS1-CA-3: For digital sensor

Downloads

OSE-nf.pdf

MotorizedStages.zip

Travel [mm]: 100?m±15%

Table Size [mm]: 60x60

Actuator: Piezo actuator

Weight [kg]: 0.33

Theoretical Resolution (open-loop) [nm]: 1

Resolution (closed-loop) [nm]: 10

Linearity [%]: 0.3 or lower

Perpendicularity (Horizontal Direction) [?m: 1

Positional Repeatability[µm]: 0.1 or lower

Load Capacity [N]: 9.8

Micro-displacement Sensor: Digital sensor

Compatible Cable: FINE-CA-3: For piezo DS1-CA-3: For digital sensor

Downloads

OSE-nf.pdf

MotorizedStages.zip

Travel [mm]: 100?m±15%

Table Size [mm]: 60x60

Actuator: Piezo actuator

Weight [kg]: 0.63

Theoretical Resolution (open-loop) [nm]: 1

Resolution (closed-loop) [nm]: 10

Linearity [%]: 0.5 or lower

Perpendicularity (Horizontal Direction) [?m: 1

Positional Repeatability[µm]: 0.15 or lower

Load Capacity [N]: 9.8

Micro-displacement Sensor: Digital sensor

Compatible Cable: FINE-CA-3: For piezo DS1-CA-3: For digital sensor

Downloads

OSE-nf.pdf

MotorizedStages.zip