Vacuum Compatible Motorized Stages

Reference number: OSE-VSGSP20-35(X)

Travel in mm

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Description

Motorized stages modified for use in high vacuum.

Travel [mm]: 35

Table Size [mm]: 60x60

Feed Screw: Precision ground screw Ø6mm, 1mm lead

Positioning Slide: Outer rail structure

Stage Material: Aluminium / Stainless steel

Finish: None

Weight [kg]: 1

Resolution/(Full) [µm/pulse]: 2

Resolution/(Half) [µm/pulse]: 1

MAX Speed [mm/sec]: 10

Positional Repeatability[µm]: 5

Load Capacity [N]: 39.2

Lost Motion [µm]: 3

Sensor Part Number: GN-PT5M3B-1 (Metrol Co., Ltd.)

Limit Sensor: Vacuum touch sensor (NORMAL CLOSE)

Origin Sensor: None

Proximity Origin Sensor: None

Type: Vacuum compatible 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)

Motor Part Number: A7298-90215KV (28mm)

Step Angle: 0.72°

Power Voltage: DC5-24V

Current Consumption: 10mA(Max 20mA)

Control Output: Mechanical

Output Logic: NORMAL CLOSE

Compatible Driver: SG-5M, SG-55M, SG-514MSC, MC-7514PCL

Compatible Controller: GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M*HIT-S, PGC-04

Downloads

OSE-nf.pdf

MotorizedStages.zip

Travel [mm]: 35

Table Size [mm]: 60x60

Feed Screw: Precision ground screw Ø8mm, 2mm lead

Positioning Slide: Outer rail structure

Stage Material: Aluminium / Stainless steel

Finish: None

Weight [kg]: 2.5

Resolution/(Full) [µm/pulse]: 4

Resolution/(Half) [µm/pulse]: 2

MAX Speed [mm/sec]: 20

Positional Repeatability[µm]: 10

Load Capacity [N]: 58.8

Lost Motion [µm]: 10

Sensor Part Number: GN-PT5M3B-1 (Metrol Co., Ltd.)

Limit Sensor: Vacuum touch sensor (NORMAL CLOSE)

Origin Sensor: None

Proximity Origin Sensor: None

Type: Vacuum compatible 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)

Motor Part Number: A7298-90215KV (28mm)

Step Angle: 0.72°

Power Voltage: DC5-24V

Current Consumption: 10mA(Max 20mA)

Control Output: Mechanical

Output Logic: NORMAL CLOSE

Compatible Driver: SG-5M, SG-55M, SG-514MSC, MC-7514PCL

Compatible Controller: GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M*HIT-S, PGC-04

Downloads

OSE-nf.pdf

MotorizedStages.zip

Travel [mm]: 35

Table Size [mm]: 60x60

Feed Screw: Precision ground screw Ø6mm, 1mm lead

Positioning Slide: Outer rail structure

Stage Material: Aluminium / Stainless steel

Finish: None

Weight [kg]: 1.1

Resolution/(Full) [µm/pulse]: 2

Resolution/(Half) [µm/pulse]: 1

MAX Speed [mm/sec]: 10

Positional Repeatability[µm]: 5

Load Capacity [N]: 39.2

Lost Motion [µm]: 3

Sensor Part Number: GN-PT5M3B-1 (Metrol Co., Ltd.)

Limit Sensor: Vacuum touch sensor (NORMAL CLOSE)

Origin Sensor: None

Proximity Origin Sensor: None

Type: Vacuum compatible 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)

Motor Part Number: A7298-90215KV (28mm)

Step Angle: 0.72°

Power Voltage: DC5-24V

Current Consumption: 10mA(Max 20mA)

Control Output: Mechanical

Output Logic: NORMAL CLOSE

Compatible Driver: SG-5M, SG-55M, SG-514MSC, MC-7514PCL

Compatible Controller: GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M*HIT-S, PGC-04

Downloads

OSE-nf.pdf

MotorizedStages.zip